JPS579116Y2 - - Google Patents

Info

Publication number
JPS579116Y2
JPS579116Y2 JP8272679U JP8272679U JPS579116Y2 JP S579116 Y2 JPS579116 Y2 JP S579116Y2 JP 8272679 U JP8272679 U JP 8272679U JP 8272679 U JP8272679 U JP 8272679U JP S579116 Y2 JPS579116 Y2 JP S579116Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8272679U
Other languages
Japanese (ja)
Other versions
JPS56598U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8272679U priority Critical patent/JPS579116Y2/ja
Publication of JPS56598U publication Critical patent/JPS56598U/ja
Application granted granted Critical
Publication of JPS579116Y2 publication Critical patent/JPS579116Y2/ja
Expired legal-status Critical Current

Links

JP8272679U 1979-06-16 1979-06-16 Expired JPS579116Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8272679U JPS579116Y2 (en]) 1979-06-16 1979-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8272679U JPS579116Y2 (en]) 1979-06-16 1979-06-16

Publications (2)

Publication Number Publication Date
JPS56598U JPS56598U (en]) 1981-01-06
JPS579116Y2 true JPS579116Y2 (en]) 1982-02-22

Family

ID=29315944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8272679U Expired JPS579116Y2 (en]) 1979-06-16 1979-06-16

Country Status (1)

Country Link
JP (1) JPS579116Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343232Y2 (en]) * 1987-09-30 1991-09-10
JPH0343233Y2 (en]) * 1987-09-30 1991-09-10
JP2501221B2 (ja) * 1988-01-13 1996-05-29 株式会社日立製作所 イオンビ―ム加工装置

Also Published As

Publication number Publication date
JPS56598U (en]) 1981-01-06

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